Sustainability 07. March 2024
High purity cleaning combines solvent and plasma processes
Achieving residual organic contamination in the atomic percentage range
In high-performance laser systems operating under high vacuum conditions, already minimal layers of organic residues can pose a risk of interfering with the process. This is why one of the leading laser manufacturers uses an EcoCcore machine with High Purity configuration and integrated, subsequent low-pressure plasma treatment for final cleaning.
The company's Innoslab laser with short and ultra-short pulses are among the most effective state-of-the-art laser-based manufacturing tools. Among others they are used in different industries for processing of metals, glass, ceramics and various plastics. Another field of application is the processing of microchips in the semi-conductor industry. Laser processing takes place under high vacuum. Therefore already minimal outgassing of organic residues from the component manufacturing step can reduce process efficiency and lead to defects.
After extensive cleaning trials in Ecoclean GmbH's High Purity Test Center, the company opted for the solvent-based EcoCcore system which operates under a full vacuum, including an integrated low-pressure plasma treatment. For this application, the contamination type on the one hand and the variety of materials and geometries on the other, were determining factors in favour of this combination of wet-chemical and dry cleaning solutions. The tests showed that the results regarding residual organic contamination were significantly better than the required values.
In high-performance laser systems operating under high vacuum conditions, already minimal layers of organic residues can pose a risk of interfering with the process. This is why one of the leading laser manufacturers uses an EcoCcore machine with High Purity configuration and integrated, subsequent low-pressure plasma treatment for final cleaning.
The company's Innoslab laser with short and ultra-short pulses are among the most effective state-of-the-art laser-based manufacturing tools. Among others they are used in different industries for processing of metals, glass, ceramics and various plastics. Another field of application is the processing of microchips in the semi-conductor industry. Laser processing takes place under high vacuum. Therefore already minimal outgassing of organic residues from the component manufacturing step can reduce process efficiency and lead to defects.
After extensive cleaning trials in Ecoclean GmbH's High Purity Test Center, the company opted for the solvent-based EcoCcore system which operates under a full vacuum, including an integrated low-pressure plasma treatment. For this application, the contamination type on the one hand and the variety of materials and geometries on the other, were determining factors in favour of this combination of wet-chemical and dry cleaning solutions. The tests showed that the results regarding residual organic contamination were significantly better than the required values.
Ecoclean GmbH
Contact
Mr. Christian Pap