Product novelty 24. April 2024
MERIDIAN Plasma Assisted Reactive Magnetron Sputtering (PARMS) system
Meridian is an effective system for high-rate deposition of high-precision optical coatings for a wide range of applications. Meridian systems help to obtain thin films of a variety of materials with high accuracy and excellent quality. Our optical monitoring system allows the processes to be fully automatic and increase the yield significantly.
Key benefits:
- Long throw sputtering configuration enabling particle free coating processes
- Sputter-Up configuration
- High-yield dual-magnetron AC sputtering systems
- Long life RF plasma sources for precleaning and assisting
- On-substrate direct Optical monitoring system I-Photonics OCP
- Double rotation planetary substrate holder allows mounting of different substrate sizes (200, 250 and 300 mm)
Applications:
- Ultra narrow band pass filters
- Multizone filters
- Steep-edge filters
- Single- and multi-notch filters
- Laser mirrors
- Thin-film polarizers
- Beam splitters
Key benefits:
- Long throw sputtering configuration enabling particle free coating processes
- Sputter-Up configuration
- High-yield dual-magnetron AC sputtering systems
- Long life RF plasma sources for precleaning and assisting
- On-substrate direct Optical monitoring system I-Photonics OCP
- Double rotation planetary substrate holder allows mounting of different substrate sizes (200, 250 and 300 mm)
Applications:
- Ultra narrow band pass filters
- Multizone filters
- Steep-edge filters
- Single- and multi-notch filters
- Laser mirrors
- Thin-film polarizers
- Beam splitters
I-Photonics
Contact
Mr. Vitali Khomich